Practical MEMS: Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems Illustrated Edition

The book quite new with hard covers. Only few makers inside cannot effect reading. For the content and edition, it is organized clear with easy-understanding pictures. Strong recommend to readers interesting into micro sensors.

Perfect

This MEMS book is a great introduction to MEMS - the explanations are clear with a nice overview of both MEMS devices and the signal conditioning that goes w/ them. I see this book being excellent for a first year graduate level course or for someone working in the field that would like to better understand MEMS devices. If you are looking for a more detailed book on MEMS device design and fabrication, etc., I recommend Senturia's MEMS book.

This book gives an excellent outline of the design process, fabrication, and cost analysis of developing a MEMS device. Highly recommended for courses focusing on MEMS development or as a reference for those experienced in the field.

good book . the only disadvance is too expensive.

This book was extremely needed, and is outstanding. Many books out there cover MEMS and integrated circuit processing. Some books cover the different types of MEMS in pretty much a survey form. Other books cover the math, but never tie it to the nitty gritty of microdevices. This book is not a survey, or another mathmatical dynamics book. It is a book covering the actual design rules, basics, and math of the major categories of microsystems. Its written well, is both understandable and complete. It is the book I will be using to teach the first year graduate class on MEMS at my university.

This book covers various kinds of MEMS used in the industry. Good as an introduction for chip designers.

It is good to find a book that covers MEMS devices from theory and design to cost and marketing. Having the information in one place is ideal for both students to learn the material and for researchers to use as a reference guide. This book helped me to design my first accelerometer and cantilever systems. The combination of fully worked out examples and easy to understand pictures helps lead to a greater understanding of MEMS devices. If you are considering entering the MEMS field and want to familiarize yourself or if you would like an easy to use reference, this is the book for you.